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| Titel: |
Difference in microstructure between PZT thin films on Pt/Ti and those on Pt |
| Auteur: |
Hase, Takashi Sakuma, Toshiyuki Amanuma, Kazushi Mori, Toru Ochi, Atsushi Miyasaka, Yoichi |
| Verschenen in: |
Integrated ferroelectrics |
| Paginering: | Jaargang 8 (1995) nr. 1-2 pagina's 89-98 |
| Jaar: |
1995-03-01 |
| Inhoud: |
PZT thin films were synthesized by sol-gel on a Pt/Ti double layer bottom electrode or on a Pt single layer bottom electrode to investigate the bottom electrode dependence of PZT film structure. On Pt/Ti, <111> oriented perovskite grains with 50-100 nm lateral size were densely packed. On Pt, large perovskite grains (2-3 μm) were surrounded by fine pyrochlore grains (about 5 nm), and no certain orientation was observed. TEM and EDX analyses suggested that a fraction of Ti in the Pt/Ti layer diffused along Pt grain boundaries up to the Pt surface and was oxidized during the PZT annealing process. A model for the crystallization of sol-gel derived PZT was proposed, in which TiOx particles at the Pt surface act as nucleation sites for PZT crystallization. This model well explained the experimental results. |
| Uitgever: |
Taylor & Francis |
| Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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