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Journal description
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Details for article 1 of 16 found articles
| Title: |
Analysis of magnetic field distribution in a cylindrical-type magnetron sputtering system |
| Author: |
Bae, Kang-Yul Yang, Young-Soo Choi, Bum-Ho |
| Appeared in: |
Proceedings of the institution of mechanical engineers, Part B: Journal of engineering manufacture |
| Paging: | Volume 227 (2013) nr. 6 pages 881-889 |
| Year: |
2013-06 |
| Contents: | |
| Publisher: |
SAGE Publications, Sage UK: London, England |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 16 found articles
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