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Journal description
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Details for article 42 of 61 found articles
| Title: |
Synchrotron X-ray topographic study of strain in silicon wafers with integrated circuits |
| Author: |
Karilahti, M. Tuomi, T. Taskinen, M. Tulkki, J. Lipsanen, H. McNally, P. |
| Appeared in: |
Il nuovo cimento. D |
| Paging: | Volume 19 (1997) nr. 2-4 pages 181-184 |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Società Italiana di Fisica, Bologna |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 42 of 61 found articles
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