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Journal description
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Details for article 20 of 22 found articles
| Title: |
Sputtering of Silicon and Silicon Dioxide by Low-Energy Ions of Dense Nitrogen and Argon Plasma |
| Author: |
Bachurin, V. I. Izyumov, M. O. Amirov, I. I. Shuvaev, N. O. |
| Appeared in: |
Bulletin of the Russian Academy of Sciences. Physics |
| Paging: | Volume 82 (2018) nr. 2 pages 127-130 |
| Year: |
2018 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 20 of 22 found articles
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