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An effective on-line surface particles inspection instrument for large aperture optical element |
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Titel: |
An effective on-line surface particles inspection instrument for large aperture optical element |
Auteur: |
Ding, Wen-Dong Zhang, Zheng-Tao Zhang, Da-Peng Xu, De Lv, Hai-Bing Miao, Xin-Xiang Zhou, Guo-Rui Liu, Hao |
Verschenen in: |
International journal of automation and computing |
Paginering: |
Jaargang 14 (2017) nr. 4 pagina's 420-431 |
Jaar: |
2017 |
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Uitgever: |
Institute of Automation, Chinese Academy of Sciences, Beijing |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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