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Journal description
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Details for article 31 of 80 found articles
| Title: |
Eccentricity estimation with error modeling in dynamic wafer handling |
| Author: |
Chen, Heping Cheng, Hongtai Moorings, Ben Stern, Harold |
| Appeared in: |
The international journal of advanced manufacturing technology |
| Paging: | Volume 68 (2013) nr. 1-4 pages 425-433 |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Springer London, London |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 80 found articles
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