Design and development of a piezoresistive pressure sensor on micromachined silicon for high-temperature applications and of a signal-conditioning electronic circuit
Titel:
Design and development of a piezoresistive pressure sensor on micromachined silicon for high-temperature applications and of a signal-conditioning electronic circuit
Auteur:
Crescini, D. Ferrari, V. Vajna, Z. K. Marioli, D. Taroni, A. Borgese, A. Marinelli, M. Milani, E. Paoletti, A. Tucciarone, A. Verona-Rinati, G.