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                                       Details for article 2 of 14 found articles
 
 
  Chemical mechanical polishing as a toolbox for thin film magnetic head manufacturing
 
 
Title: Chemical mechanical polishing as a toolbox for thin film magnetic head manufacturing
Author: van Heeren, H.
Bertens, T.
Pronk, F.
Attenborough, K.
Appeared in: Microsystem technologies
Paging: Volume 9 (2003) nr. 3 pages 155-158
Year: 2003
Contents:
Publisher: Springer-Verlag, Berlin Heidelberg
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 2 of 14 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands