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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
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Details for article 23 of 27 found articles
| Title: |
Study on three-dimensional micromachining using synchrotron radiation etching |
| Author: |
Nishi, N. Katoh, T. Ueno, H. Sugiyama, S. |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 9 (2002) nr. 1-2 pages 1-4 |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 27 found articles
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