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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 7 of 10 found articles
| Title: |
Swelling of SU-8 structure in Ni mold fabrication by UV-LIGA technique |
| Author: |
Yi, Luo Xiaodong, Wang Chong, Liu Zhifeng, Lou Denan, Chu Dehui, Yu |
| Appeared in: |
Microsystem technologies |
| Paging: | Volume 11 (2005) nr. 12 pages 1272-1275 |
| Year: |
2005 |
| Contents: | |
| Publisher: |
Springer-Verlag, Berlin/Heidelberg |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 10 found articles
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