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                                       Details for article 6 of 24 found articles
 
 
  Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes
 
 
Title: Integration of wear-resistant titanium carbide coatings into MEMS fabrication processes
Author: Radhakrishnan, G.
Adams, P.M.
Robertson, R.
Cole, R.
Appeared in: Tribology letters
Paging: Volume 8 (2000) nr. 2-3 pages 133-137
Year: 2000
Contents:
Publisher: Kluwer Academic Publishers-Plenum Publishers, New York
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 24 found articles
 
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