|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 4 of 11 found articles
| Title: |
Large area deposition of Pb(Zr,Ti)O3 thin films for piezoelectric MEMS devices |
| Author: |
Suchaneck, Gunnar Vidyarthi, Vinay S. Reibold, Marianne Deyneka, Alexander Jastrabik, Lubomir Gerlach, Gerald Hartung, Johannes |
| Appeared in: |
Journal of electroceramics |
| Paging: | Volume 20 (2007) nr. 1 pages 17-20 |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Springer US, Boston |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 11 found articles
| << previous | next >> |