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  Development and application of a multipurpose electrodeposition cell configuration for studying plating processes on wafer specimen and for characterizing surface films by scanning electrochemical microscopy
 
 
Title: Development and application of a multipurpose electrodeposition cell configuration for studying plating processes on wafer specimen and for characterizing surface films by scanning electrochemical microscopy
Author: Hanekamp, Patrick
Robl, Werner
Matysik, Frank-Michael
Appeared in: Journal of applied electrochemistry
Paging: Volume 47 (2017) nr. 12 pages 1305-1312
Year: 2017
Contents:
Publisher: Springer Netherlands, Dordrecht
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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