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Journal description
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Details for article 5 of 19 found articles
| Title: |
Chemical composition of an inductively coupled hexamethyldisilazane–argon plasma and properties of films grown in this plasma |
| Author: |
Shayapov, V. R. Chagin, M. N. Rumyantsev, Yu. M. |
| Appeared in: |
Inorganic materials |
| Paging: | Volume 52 (2016) nr. 6 pages 630-636 |
| Year: |
2016 |
| Contents: | |
| Publisher: |
Pleiades Publishing, Moscow |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 5 of 19 found articles
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