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                                       Details for article 21 of 33 found articles
 
 
  Shift scheduling for steppers in the semiconductor wafer fabrication process
 
 
Title: Shift scheduling for steppers in the semiconductor wafer fabrication process
Author: Sooyoung Kim
SeungHee Yea
Bokang Kim
Appeared in: IIE Transactions
Paging: Volume 34 (2002) nr. 2 pages 11 p.
Year: 2002-02
Contents:
Publisher: Kluwer Academic Publishers, Boston, U.S.A
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 21 of 33 found articles
 
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