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                                       Details for article 97 of 124 found articles
 
 
  RF-magnetron sputtering deposition of ultra-thin Hf0.5Zr0.5O2 films for non-volatile memory applications
 
 
Title: RF-magnetron sputtering deposition of ultra-thin Hf0.5Zr0.5O2 films for non-volatile memory applications
Author: Ambriz-Vargas, F.
Nouar, R.
Kolhatkar, G.
Sarkissian, A.
Thomas, R.
Gomez-Yáñez, C.
Gauthier, M.A.
Ruediger, A.
Appeared in: Materials today: proceedings
Paging: Volume 4 (2017) nr. 7P1 pages 11 p.
Year: 2017
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 97 of 124 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands