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Journal description
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Details for article 29 of 112 found articles
| Title: |
Fabrication of MEMS Platform for Sensors Applications by Laser Micro Engraving |
| Author: |
Oblov, Konstantin Ivanova, Anastasia Soloviev, Sergey Samotaev, Nikolay Vasiliev, Alexey Sokolov, Andrey |
| Appeared in: |
Physics procedia |
| Paging: | Volume 72 (2015) nr. C pages 5 p. |
| Year: |
2015 |
| Contents: | |
| Publisher: |
The Authors |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 112 found articles
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