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                                       Details for article 7 of 31 found articles
 
 
  A novel lateral shearing interferometer and its anti-vibration characteristic for on-machine precision surface measurement
 
 
Title: A novel lateral shearing interferometer and its anti-vibration characteristic for on-machine precision surface measurement
Author: Chen, Liangzhou
Liu, Xiaojun
Gao, Yongsheng
Appeared in: Optik
Paging: Volume 127 (2016) nr. 14 pages 9 p.
Year: 2016
Contents:
Publisher: Elsevier GmbH
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 31 found articles
 
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