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Journal description
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Details for article 75 of 132 found articles
| Title: |
Mixed multi-region design of diffractive optical element for projection exposure system |
| Author: |
Hu, Zhonghua Zhu, Jing Yang, Baoxi Xiao, Yanfen Zeng, Aijun Huang, Huijie |
| Appeared in: |
Optik |
| Paging: | Volume 124 (2013) nr. 22 pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier GmbH |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 75 of 132 found articles
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