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Journal description
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Details for article 10 of 20 found articles
| Title: |
Etching blazed grating into quartz substrate with selectivity 1:1 against photoresist by inductively coupled plasma technology |
| Author: |
Sun, Xiao-Dong Kuang, Deng-Feng Mu, Guo-Guang |
| Appeared in: |
Optik |
| Paging: | Volume 122 (2011) nr. 5 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier GmbH |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 20 found articles
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