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  A new sputtered amorphous thin-film pressure transducer
 
 
Title: A new sputtered amorphous thin-film pressure transducer
Author: Jun-Qin, Huang
Xian-An, Cheng
Zhi-Ying, Wang
Appeared in: Sensors and actuators
Paging: Volume 19 (1989) nr. 1 pages 10 p.
Year: 1989
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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