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Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency |
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Title: |
Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency |
Author: |
Zhang, Guojun Ding, Junwen Xu, Wei Liu, Yuan Wang, Renxin Han, Janjun Bai, Bing Xue, Chenyang Liu, Jun Zhang, Wendong |
Appeared in: |
Mechanical systems and signal processing |
Paging: |
Volume 104 (2018) nr. C pages 607-618 |
Year: |
2018 |
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Publisher: |
Elsevier Ltd |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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