Thickness dependent barrier performance of permeation barriers made from atomic layer deposited alumina for organic devices
Title:
Thickness dependent barrier performance of permeation barriers made from atomic layer deposited alumina for organic devices
Author:
Klumbies, Hannes Schmidt, Peter Hähnel, Markus Singh, Aarti Schroeder, Uwe Richter, Claudia Mikolajick, Thomas Hoßbach, Christoph Albert, Matthias Bartha, Johann W. Leo, Karl Müller-Meskamp, Lars