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Journal description
All volumes of the corresponding journal
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Details for article 7 of 16 found articles
| Title: |
Low energy ion beam assisted deposition of TiN thin films on silicon |
| Author: |
Huang, J.-H Lin, C.-H Ma, C.-H Chen, Haydn |
| Appeared in: |
Scripta materialia |
| Paging: | Volume 42 (2000) nr. 6 pages 7 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Acta Metallurgica Inc. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 16 found articles
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