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                                       Details for article 58 of 82 found articles
 
 
  Microcrystalline Si films deposited from dichlorosilane using RF-PECVD
 
 
Title: Microcrystalline Si films deposited from dichlorosilane using RF-PECVD
Author: Guo, Lihui
Kondo, Michio
Matsuda, Akihisa
Appeared in: Solar energy materials and solar cells
Paging: Volume 66 (2001) nr. 1-4 pages 8 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 58 of 82 found articles
 
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