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                                       Details for article 38 of 82 found articles
 
 
  High growth-rate fabrication of micro-crystalline silicon by Helicon wave plasma CVD
 
 
Title: High growth-rate fabrication of micro-crystalline silicon by Helicon wave plasma CVD
Author: Endo, Koji
Isomura, Masao
Taguchi, Mikio
Tarui, Hisaki
Kiyama, Seiichi
Appeared in: Solar energy materials and solar cells
Paging: Volume 66 (2001) nr. 1-4 pages 6 p.
Year: 2001
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 38 of 82 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands