The interface of a-SiN x :H and Si: Linking the nano-scale structure to passivation quality
Titel:
The interface of a-SiN x :H and Si: Linking the nano-scale structure to passivation quality
Auteur:
Lamers, Machteld Hintzsche, Leif E. Butler, Keith T. Vullum, Per Erik Fang, Chang-Ming Marsman, Martijn Jordan, Gerald Harding, John H. Kresse, Georg Weeber, Arthur