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Journal description
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Details for article 37 of 46 found articles
| Title: |
Silicon ic process compatible thin metal film post-processing module |
| Author: |
Wijngaards, Davey Bartek, Marian Wolffenbuttel, Reinoud F. |
| Appeared in: |
Sensors and Actuators. A, Physical |
| Paging: | Volume 68 (1998) nr. 1-3 pages 10 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. All rights reserved |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 37 of 46 found articles
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