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A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits |
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Title: |
A dedicated micromachining technology for high-aspect-ratio millimetre-wave circuits |
Author: |
Saint-Etienne, E. Pons, P. Blasquez, G. Temple, P. Conedera, V. Dilhan, M. Chauffleur, X. Menini, Ph. Plana, R. Parra, T. Guillon, B. Lalaurie, J.C. |
Appeared in: |
Sensors and Actuators. A, Physical |
Paging: |
Volume 68 (1998) nr. 1-3 pages 7 p. |
Year: |
1998 |
Contents: |
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Publisher: |
Elsevier Science S.A. All rights reserved |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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