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Journal description
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Details for article 1 of 17 found articles
| Title: |
Atom probe tomography analysis of SiGe fins embedded in SiO2: Facts and artefacts |
| Author: |
Melkonyan, D. Fleischmann, C. Arnoldi, L. Demeulemeester, J. Kumar, A. Bogdanowicz, J. Vurpillot, F. Vandervorst, W. |
| Appeared in: |
Ultramicroscopy |
| Paging: | Volume 179 (2017) nr. C pages 100-107 |
| Year: |
2017 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 17 found articles
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