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Journal description
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Details for article 134 of 136 found articles
| Title: |
Voltage–current characteristics of a high-power pulsed sputtering (HPPS) glow discharge and plasma density estimation |
| Author: |
Yukimura, Ken Mieda, Ryosuke Azuma, Kingo Tamagaki, Hiroshi Okimoto, Tadao |
| Appeared in: |
Nuclear instruments and methods in physics research. Section B, Beam interactions with materials and atoms |
| Paging: | Volume 267 (2009) nr. 8-9 pages 4 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 134 of 136 found articles
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