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                                       Details for article 18 of 65 found articles
 
 
  Etching and oxidation of InAs in planar inductively coupled plasma
 
 
Title: Etching and oxidation of InAs in planar inductively coupled plasma
Author: Dultsev, F.N.
Kesler, V.G.
Appeared in: Applied surface science
Paging: Volume 256 (2009) nr. 1 pages 5 p.
Year: 2009
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 18 of 65 found articles
 
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