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                                       Details for article 51 of 60 found articles
 
 
  Surface reaction mechanism of Y2O3 atomic layer deposition on the hydroxylated Si(100)-2×1: A density functional theory study
 
 
Title: Surface reaction mechanism of Y2O3 atomic layer deposition on the hydroxylated Si(100)-2×1: A density functional theory study
Author: Ren, Jie
Zhou, Guangfen
Hu, Yongqi
Zhang, David Wei
Appeared in: Applied surface science
Paging: Volume 255 (2009) nr. 16 pages 6 p.
Year: 2009
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 51 of 60 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands