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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 49 of 68 found articles
| Title: |
Optimization of ohmic contact and adhesion on polysilicon in MEMS–NEMS wet etching process |
| Author: |
Herth, E. Algré, E. Legrand, B. Buchaillot, L. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 88 (2011) nr. 5 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 49 of 68 found articles
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