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Journal description
All volumes of the corresponding journal
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Details for article 43 of 68 found articles
| Title: |
Microstructure and stress in high-k Hf–Y–O thin films |
| Author: |
Gluch, J. Rößler, T. Menzel, S.B. Eckert, J. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 88 (2011) nr. 5 pages 3 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 43 of 68 found articles
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