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Journal description
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Details for article 4 of 68 found articles
| Title: |
Annealing effect on the metal gate effective work function modulation for the Al/TiN/SiO2/p-Si structure |
| Author: |
Wang, Xiao-Rong Jiang, Yu-Long Xie, Qi Detavernier, Christophe Ru, Guo-Ping Qu, Xin-Ping Li, Bing-Zong |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 88 (2011) nr. 5 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 4 of 68 found articles
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