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Journal description
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Details for article 12 of 68 found articles
| Title: |
Comparison of radio frequency physical vapor deposition target material used for LaO x cap layer deposition in 32nm NMOSFETs |
| Author: |
Baudot, S. Caubet, P. Grégoire, M. Bianchi, R.A. Pantel, R. Zoll, S. Gros-Jean, M. Boujamaa, R. Normandon, P. Leroux, C. Ghibaudo, G. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 88 (2011) nr. 5 pages 4 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 12 of 68 found articles
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