|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 15 of 30 found articles
| Title: |
Fabrication of a low resistivity tantalum nitride thin film |
| Author: |
Shen, Hong Ramanathan, Ravi |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 83 (2006) nr. 2 pages 7 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 15 of 30 found articles
| << previous | next >> |