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                                       Details for article 49 of 57 found articles
 
 
  Stability of conducting amorphous Ru–Si–O thin films under oxygen annealing
 
 
Title: Stability of conducting amorphous Ru–Si–O thin films under oxygen annealing
Author: Cherry, H.B
Giauque, P.H
Nicolet, M.-A
Appeared in: Microelectronic engineering
Paging: Volume 55 (2001) nr. 1-4 pages 6 p.
Year: 2001
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 49 of 57 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands