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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 29 of 130 found articles
| Title: |
Copper dry etching technique for ULSI interconnections |
| Author: |
Markert, Matthias Bertz, Andreas Gessner, Thomas |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 35 (1997) nr. 1-4 pages 333-336 |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 29 of 130 found articles
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