|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 13 of 130 found articles
| Title: |
Anisotropic etching of inverted pyramids in the sub-100 nm region |
| Author: |
Hantschel, T. Vandervorst, W. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 35 (1997) nr. 1-4 pages 405-407 |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 130 found articles
| << previous | next >> |