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Journal description
All volumes of the corresponding journal
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Details for article 24 of 26 found articles
| Title: |
The electron-beam and x-ray lithographic performance of the high resolution CAMP and ARCH family of chemically amplified resists |
| Author: |
Novembre, Anthony E. Münzel, Norbert |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 32 (1996) nr. 1-4 pages 11 p. |
| Year: |
1996 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. All rights reserved |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 24 of 26 found articles
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