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Journal description
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Details for article 98 of 121 found articles
| Title: |
Substituted polyhydroxystyrenes as matrix resins for chemically amplified deep UV resist materials |
| Author: |
Pawlowski, Georg Dammel, Ralph Eckes, Charlotte Lindley, Charlet R. Meier, Winfried Przybilla, Klaus-Jürgen Röschert, Horst Spiess, Walter |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 13 (1991) nr. 1-4 pages 4 p. |
| Year: |
1991 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 98 of 121 found articles
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