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Journal description
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Details for article 8 of 183 found articles
| Title: |
Analysis of time dependent polymer deformation based on a viscoelastic model in thermal imprint process |
| Author: |
Takagi, H. Takahashi, M. Maeda, R. Onishi, Y. Iriye, Y. Iwasaki, T. Hirai, Y. |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 5-6 pages 5 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 8 of 183 found articles
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