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                                       Details for article 6 of 183 found articles
 
 
  A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology
 
 
Title: A miniaturized RMS voltage sensor based on a torsional actuator in bulk silicon technology
Author: Dittmer, Jan
Judaschke, Rolf
Büttgenbach, Stephanus
Appeared in: Microelectronic engineering
Paging: Volume 85 (2008) nr. 5-6 pages 3 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 6 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands