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                                       Details for article 183 of 183 found articles
 
 
  Visualizing stress in silicon micro cantilevers using scanning confocal Raman spectroscopy
 
 
Title: Visualizing stress in silicon micro cantilevers using scanning confocal Raman spectroscopy
Author: Bauer, M.
Gigler, A.M.
Richter, C.
Stark, R.W.
Appeared in: Microelectronic engineering
Paging: Volume 85 (2008) nr. 5-6 pages 4 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 183 of 183 found articles
 
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