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Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 167 of 183 found articles
| Title: |
Static contact micro four-point probes with <11nm positioning repeatability |
| Author: |
Petersen, Dirch H. Hansen, Ole Hansen, Torben M. Petersen, Peter R.E. Bøggild, Peter |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 5-6 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 167 of 183 found articles
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