|
| << previous | next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 154 of 183 found articles
| Title: |
Residual layer thickness in nanoimprint: Experiments and coarse-grain simulation |
| Author: |
Kehagias, Nikolaos Reboud, Vincent Sotomayor Torres, Clivia M. Sirotkin, Vadim Svintsov, Alexander Zaitsev, Sergey |
| Appeared in: |
Microelectronic engineering |
| Paging: | Volume 85 (2008) nr. 5-6 pages 4 p. |
| Year: |
2008 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 154 of 183 found articles
| << previous | next >> |