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                                       Details for article 13 of 183 found articles
 
 
  A novel SLS ELA crystallization process and its effects on polysilicon film defectivity and TFT performance
 
 
Title: A novel SLS ELA crystallization process and its effects on polysilicon film defectivity and TFT performance
Author: Moschou, Despina C.
Exarchos, M.A.
Kouvatsos, D.N.
Papaioannou, G.J.
Voutsas, A.T.
Appeared in: Microelectronic engineering
Paging: Volume 85 (2008) nr. 5-6 pages 6 p.
Year: 2008
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 13 of 183 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands