|
Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials |
|
|
|
Titel: |
Nanofabrication of SiC templates for direct hot embossing for metallic photonic structures and meta materials |
Auteur: |
Chen, Yifang Zhou, Yun Pan, Genhua Huq, Ejaz Lu, Bing-Rui Xie, Shen-Qi Wan, Jing Shu, Zhen Qu, Xin-Ping Liu, Ran Banu, S. Birtwell, S. Jiang, Liudi |
Verschenen in: |
Microelectronic engineering |
Paginering: |
Jaargang 85 (2008) nr. 5-6 pagina's 5 p. |
Jaar: |
2008 |
Inhoud: |
|
Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
|
|
|
|